Improving the Accuracy and Efficiency of Junction Capacitance Characterization: Strategies for Probing Configuration and Data Set Size
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چکیده
In this paper, the on-wafer measurement of junction depletion capacitance is examined. This work provides an in-depth discussion of possible probing configurations which can be used. It outlines a method to consistently measure the junction capacitances accurately. The results from this method compare favorably with those extracted using S-parameter measurements. Additionally, methods are formulated to reduce the number of data points required for parameter extraction while at the same time maintaining a high model accuracy.
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تاریخ انتشار 2001